Fluorinated Metal-Oxide Thin-Film Transistors for Circuit Implementation on a Flexible Substrate
نویسندگان
چکیده
The effects of fluorination on amorphous indium gallium zinc oxide thin-film transistors and circuits fabricated a polyimide flexible substrate were studied. Attributed to more effective passivation donor defects for given thermal budget, resulted in suppressed apparent short-channel better uniformity turn-on voltage with reduced negative shift after laser lift-off from glass carrier substrate. As representative digital circuits, two-input four-output (2-4) decoders characterized demonstrate the advantages incorporating construction circuit building blocks, leading higher gain, wider noise margins, tightly distributed transition voltage, larger output swing.
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ژورنال
عنوان ژورنال: IEEE journal on flexible electronics
سال: 2022
ISSN: ['2768-167X']
DOI: https://doi.org/10.1109/jflex.2021.3140044